High-NA EUV: Printing Smaller With a Wider Lens
From Future Thinking Lab · 00:05:36
Show by Bryan
The newest chipmaking machines cost at least €350 million each, and their key upgrade is a wider lens. Helen explains how raising numerical aperture from 0.33 to 0.55 lets EUV light print finer features. She also covers why that halves the exposure field, and how Intel and TSMC are betting differently on when the trade-off pays.You'll learn:The simple resolution rule behind every lithography machine, and which knob High-NA turnsWhy anamorphic optics halve the exposure field, and what "stitching" means for big chipsThe cost trade against multi-patterning, and Intel's versus TSMC's timelinesFor education only.
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